Study of Micro Vibration Detection Based on the Tunneling Effect
Scanning tunneling microscopy is a precise nano measuring machine, and high precision means the influence factors of scanning tunneling microscopy is important to the measurement result. The micro vibration is an obvious interferential factor to scanning tunneling microscopy, especially the low frequency vibration. In order to avoid the influence of vibration, the vibration detection in the tunneling state and vibration compensation are key aspect and are one passive approach to improve the measurement accuracy.
M. C. Li "Study of Micro Vibration Detection Based on the Tunneling Effect", Key Engineering Materials, Vols. 480-481, pp. 883-886, 2011