Study of Micro Vibration Detection Based on the Tunneling Effect

Meng Chao Li

doi:10.4028/www.scientific.net/KEM.480-481.883

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 480-481Study of Micro Vibration Detection Based on the...

Study of Micro Vibration Detection Based on the Tunneling Effect

Abstract:

Scanning tunneling microscopy is a precise nano measuring machine, and high precision means the influence factors of scanning tunneling microscopy is important to the measurement result. The micro vibration is an obvious interferential factor to scanning tunneling microscopy, especially the low frequency vibration. In order to avoid the influence of vibration, the vibration detection in the tunneling state and vibration compensation are key aspect and are one passive approach to improve the measurement accuracy.

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Key Engineering Materials (Volumes 480-481)

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883-886

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.480-481.883

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Online since:

June 2011

Authors:

Meng Chao Li

Keywords:

Frequency Response, Tunneling State, Vibration Compensation, Vibration Detection

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