Low-Temperature Synthesis and Gas Sensing Properties of Anatase TiO2 Thin Films
Crystalline anatase TiO2 thin films were obtained on glass substrates at 60°C, 75°C and 90°C, respectively, by liquid phase deposition (LPD) method without subsequent heat treatment. X-ray diffraction (XRD), atomic force microscopy (AFM) and UV-Vis spectrophotometer were used to characterize the as-synthesized TiO2 thin films. The H2 sensing properties of the TiO2 thin films based sensors were investigated. The results show that the gas sensors signal Ra/Rg (Ra: resistance in air, Rg: resistance in a sample gas) decreases with the increasing deposition temperature. The TiO2 thin films obtained at deposition temperature of 60°C exhibited the maximum H2 gas response at 350°C, and the magnitude of the sensor signal and the response time for 500ppm H2 was 1.25 and 17s, respectively.
Yiwang Bao, Danyu Jiang, Li Tian and Jianghong Gong
F. J. Ren et al., "Low-Temperature Synthesis and Gas Sensing Properties of Anatase TiO2 Thin Films", Key Engineering Materials, Vol. 492, pp. 300-303, 2012