Evaluation on Structure and Tribological Properties of Carbon Nitride Films Deposited on YG8 Carbide Alloy Substrates

Abstract:

CNx films were deposited on YG8 carbide alloy (WC+8%Co) substrates by DC or RF magnetron sputtering. The composition, bonding state, adhesion, and tribological behavior of CNx films were researched. X-ray Photoelectron spectroscopy results showed that C-N, C=N and C≡N bond existed in CNx films. RF magnetron sputtering is in favor of the bonding of C and N, the adhesion and the wear resistance of CNx films. DC magnetron sputtering is in favor of lubricating ability of CNx films. Substrate bias has some effect on the bonding of C and N, the adhesion of the films, decrease of adhesive wear and the friction coefficient of films.

• Periodical: Key Engineering Materials (Volume 492)
• Pages: 80-84
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.492.80
• Online since: September 2011
• Authors: Jun Liu, Zhi Gang Chen, Kai Bi, Yue Min Wang
• Keywords: Adhesion, CNx Film, Tribology

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