Polymer Coated Microfabricated Interdigitated Electrodes Arrays for Gas Sensing Applications

Abstract:

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InterDigitated Capacitive (IDC) sensor arrays are fabricated with conventional microelectronics-micromachining technologies on quartz substrates. After fabrication, a polymeric well is patterned around each IDC to precisely define the sensing area and thus deposit coatings of various polymers, by drop casting, in a reproducible and controlled manner. The gas sensing performance of the IDC array is presented for humidity and p-xylene.

Info:

Periodical:

Edited by:

E. Hristoforou and D.S. Vlachos

Pages:

87-90

DOI:

10.4028/www.scientific.net/KEM.495.87

Citation:

P. Oikonomou et al., "Polymer Coated Microfabricated Interdigitated Electrodes Arrays for Gas Sensing Applications", Key Engineering Materials, Vol. 495, pp. 87-90, 2012

Online since:

November 2011

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Price:

$35.00

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