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HomeKey Engineering MaterialsKey Engineering Materials Vol. 495Polymer Coated Microfabricated Interdigitated...

Polymer Coated Microfabricated Interdigitated Electrodes Arrays for Gas Sensing Applications

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Abstract:

InterDigitated Capacitive (IDC) sensor arrays are fabricated with conventional microelectronics-micromachining technologies on quartz substrates. After fabrication, a polymeric well is patterned around each IDC to precisely define the sensing area and thus deposit coatings of various polymers, by drop casting, in a reproducible and controlled manner. The gas sensing performance of the IDC array is presented for humidity and p-xylene.

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Materials and Applications for Sensors and Transducers

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Periodical:

Key Engineering Materials (Volume 495)

Pages:

87-90

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.495.87

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Online since:

November 2011

Authors:

P. Oikonomou, K. Manoli, D. Goustouridis, A. Botsialas, E. Valamontes, I. Raptis, M. Sanopoulou

Keywords:

Chemocapacitor, Gas Sensor, Polymer Swelling

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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