Polymer Coated Microfabricated Interdigitated Electrodes Arrays for Gas Sensing Applications
InterDigitated Capacitive (IDC) sensor arrays are fabricated with conventional microelectronics-micromachining technologies on quartz substrates. After fabrication, a polymeric well is patterned around each IDC to precisely define the sensing area and thus deposit coatings of various polymers, by drop casting, in a reproducible and controlled manner. The gas sensing performance of the IDC array is presented for humidity and p-xylene.
E. Hristoforou and D.S. Vlachos
P. Oikonomou et al., "Polymer Coated Microfabricated Interdigitated Electrodes Arrays for Gas Sensing Applications", Key Engineering Materials, Vol. 495, pp. 87-90, 2012