Thin films of TiO2 have been deposited on to cleaned glass substrate by sol gel spin coating method. The XRD analyses confirm different crystalline phases of TiO2 thin films. The grain size calculated by the help of Scherer’s formula and found to be 23nm, 37nm and 54 nm respectively for TiO2(004), TiO2(200) and TiO2(211) orientations. The band gap was calculated 3.6 eV by UV-spectrophotometer. The refractive index of the TiO2 film was measured by Ellipsometry and found to be 2.33. Conductivity was measured using Current voltage (I-V) characteristics. To determine composition and thermal stability, thermo gravimetric Analyzer (TGA) and Differential Scanning Calorimeter (DSC) analysis was made on samples.