Linewidth Enhancement in Direct Laser Writer by Using an Interference Phenomenon

Hyug Gyo Rhee; Yun Woo Lee

doi:10.4028/www.scientific.net/KEM.516.198

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 516Linewidth Enhancement in Direct Laser Writer by...

Linewidth Enhancement in Direct Laser Writer by Using an Interference Phenomenon

Abstract:

The linewidth of a direct laser writer is limited by the Rayleigh criteria. We propose a new direct laser writer that can overcome this limitation by employing the interference phenomenon. An interference generator is introduced into our system to separate an input beam into two orthogonally polarized beams. After going through an exposure lens, these two beams meet again on the focal point, and generate a small interferogram that sharpens the shape of the focused beam spot.

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Key Engineering Materials (Volume 516)

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198-202

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.516.198

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June 2012

Authors:

Hyug Gyo Rhee, Yun Woo Lee

Keywords:

Direct Laser Writer, Interference

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