Design and Test of a Three-Axis Mosaic Surface Encoder

Woo Jae Kim; Yuki Shimizu; Koji Hosono; So Ito; Wei Gao

doi:10.4028/www.scientific.net/KEM.523-524.919

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 523-524Design and Test of a Three-Axis Mosaic Surface...

Design and Test of a Three-Axis Mosaic Surface Encoder

Abstract:

A three-axis mosaic surface encoder, which can measure the X-directional position and the Y-, Z-directional straightness of the linear stage in a long range, is proposed. The three-axis mosaic surface encoder is composed of multiple scanning probes and a mosaic scale grating. The mosaic scale grating is constructed by placing the multiple two-dimensional reflective-type scale gratings in a line to obtain long measurement range along the in-plane direction of a scale grating. In addition, the optical configuration of the encoder head, which employs multiple scanning probes to be projected on the mosaic scale grating, is proposed so that a long range measurement can be achieved by the mosaic scale gratings. With the proposed encoder head, the measurement information of the X-directional displacement can always be obtained from the probe which is not on the gaps of the mosaic scale grating. The proposed configuration was applied to the three-axis surface encoder, and basic performances of the proposed three-axis mosaic surface encoder are experimentally investigated.

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Periodical:

Key Engineering Materials (Volumes 523-524)

Pages:

919-924

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.523-524.919

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Online since:

November 2012

Authors:

Woo Jae Kim, Yuki Shimizu, Koji Hosono, So Ito, Wei Gao

Keywords:

Linear Stage, Mosaic Grating, Multiple-Probe, Optical Sensor, Position Measurement

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