Optimization of Maximum VO2 Content in Polymorphous Oxides of Vanadium

S.N. Svitasheva

doi:10.4028/www.scientific.net/KEM.538.113

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 538Optimization of Maximum VO2 Content in...

Optimization of Maximum VO₂ Content in Polymorphous Oxides of Vanadium

Abstract:

Optical properties of thin films of vanadium thermally oxidized at air were studied by ellipsometric method using wavelength of He-Ne laser. Multipart composition of these films was revealed and method of optimization of technological conditions based on dynamic of changing optical constants near 68°C was developed.

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Key Engineering Materials (Volume 538)

Pages:

113-116

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.538.113

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Online since:

January 2013

Authors:

S.N. Svitasheva

Keywords:

Ellipsometry, Insulator-Metal Transition, Optical Properties of Thin Films, Vanadium Dioxide

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