For Libraries For Publication Open Access Downloads About Us Contact Us
Paper Titles
Thermal Cycling Effect on Mechanical Properties of Yttria-Stabilized Tetragonal Zirconia
p.121
Fabrication of Electroosmotic Flow Pump on Polymethylemethacrylate Substrate Using Hot Embossing
p.125
Preparation and Properties of Waterborne Cationic Polyurethanes/Polypyrrole Conductive Composites
p.129
Designing of Thermistor Digital Thermometer Based on Unbalanced Electric Bridge
p.133
Influence of Hydrogen Dilution on Microstructure of μc-Si: H Films
p.138
Study on the Synthesis of Nano-Crystalline Mg2SiO4 Powders by Aqueous Sol-Gel Process
p.142
Environmental Oxidative Degradation and Biodegradation of Eco-Benign Plastics
p.146
In Situ Thermal Oxidation Route to SnO2 Nanostructures
p.150
Effects of Al2O3 on the Structure and Properties of Aluminoborosilicate Glasses
p.154

Influence of Hydrogen Dilution on Microstructure of μc-Si: H Films

Article Preview

Abstract:

The influence of hydrogen dilution (D) on glass/stainless steel-based intrinsic amorphous/microcrystalline silicon thin film prepared was investigated by PECVD technology. The crystallization ratio and grain size of the silicon thin film at different hydrogen dilution is studied. The results reveal that the crystallization ratio and grain size of silicon thin film changed along with D. The crystallization ratio and grain size of the silicon thin film become larger when D is higher. However, the deposition rate is slow when the D value is too high. On this work, optimal μc-Si:H can be obtained at D of about 98% in the suitable experimental conditions.

You might also be interested in these eBooks
Progress in Functional Materials View Preview

Info:

Periodical:

Key Engineering Materials (Volume 538)

Pages:

138-141

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.538.138

Citation:

Cite this paper

Online since:

January 2013

Authors:

Lan Li Chen, Jia Hui Yu, Sheng Zhao Wang, Ming Ji Shi

Keywords:

Plasma Enhanced Chemical Vapor Deposition (PECVD), Silicon Thin Film, Substrate Temperature

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2013 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] H. Fujiwara and M. Kondo: J. Appl. Phys.Vol.101 (2007), p.054516.

Google Scholar

[2] H. Fujiwara, T. Kaneko and M. Kondo: Solar Energy Materials and Solar Cells,Vol. 93(2009), p.725.

Google Scholar

[3] R. Dewarrat and J. Robertson: Thin Solid Films, Vol.427 (2003), p.11.

Google Scholar

[4] J. X. Lu, S. T. Wen, X. J. Guo, R. Li and L. Zhang: J. Zhengzhou Univ. Vol.140 (2008), p.78.

Google Scholar

[5] Y. S. Chen, J.H. Wang, J. X. Lu: Chinese Physics B. Vol.17 (2008), p.3464.

Google Scholar

[6] S. Z. Wang, J. X. Lu, H. J. Wang, P. Liu, Y. S. Chen, S. E. Yang and X.Y. Gao: Renewable Energy. Vol.128 (2006), p.18.

Google Scholar

© 2025 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied.
Scientific.Net is a registered trademark of Trans Tech Publications Ltd.