Surface Uniformity of CVD Diamond Film Polishing by Catalytic Polishing Method

Di Feng Zhou; Xiu Lian Zheng; Chen Ruan; Li Zhang

doi:10.4028/www.scientific.net/KEM.546.102

Paper Titles

Characteristics Analysis of Acoustic Emission Signals from Tensile Process of High Pressure Gas Cylinder Materials
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Dynamic Analysis of Leveling Mechanism of New Goose-Neck Jib Gondola
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Engineering Graphics Model Room Based on VRML
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Lens Detection Technology and its Machining Allowance Prediction Based on MATLAB
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Surface Uniformity of CVD Diamond Film Polishing by Catalytic Polishing Method
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Experimental Determination of Isothermal Section at 900°C in the Fe-Nb-V Ternary System
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Investigation on Thermal Conductivity of Low Concentration AlN/EG Nanofluids
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Simulation Research on Climbing Ability of Shovel Loader with Four Tracks
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Modal Analysis of Special High-Pressure Seamless Cylinders Based on ANSYS 12.0
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 546Surface Uniformity of CVD Diamond Film Polishing...

Surface Uniformity of CVD Diamond Film Polishing by Catalytic Polishing Method

Abstract:

CVD diamond is the main trend of future diamond materials. Surface uniformity of CVD diamond film polishing is one of the key technologies to expand the application of CVD diamond. Based on the catalytic polishing method, rotation velocity of the planet wheel is achieved when the lapping plate is in different rotation velocity and different bias distance by mechanics analysis. The lapping surface uniformity is analyzed to find out the best bias distance and velocity ratio by simulating the lapping times of different CVD diamond film with different velocity ratio and bias distance. At last, the lapping planet velocity and bias distance are achieved when polishing is in the best condition. The high uniformity surface can be achieved when polishing is carried out in these parameters.

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Periodical:

Key Engineering Materials (Volume 546)

Pages:

102-106

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.546.102

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Online since:

March 2013

Authors:

Di Feng Zhou, Xiu Lian Zheng, Chen Ruan, Li Zhang

Keywords:

Catalytic Polishing, CVD Diamond, Surface Uniformity

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References

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