Clitella Magnetorheological Finishing Method and Equipment

Zhi Qiang Yang; Zhong Da Guo; Wei Guo Liu

doi:10.4028/www.scientific.net/KEM.552.227

Paper Titles

Characterization of Cutting-Induced Heat Generation in Ultra-Precision Milling of Aluminium Alloy 6061
p.201

Maskless Lithography Based on DMD
p.207

Modelling and Optimization of DLC Film Thickness Variation for PECVD Processes
p.214

Removal Method of Core Shaft of Primary Mirror
p.221

Clitella Magnetorheological Finishing Method and Equipment
p.227

Study on the Control System of Area-Contact Magnetorheological Finishing Machine
p.234

Process Prediction for Low-Energy Ion Beam Figuring Based on BH Modified Model
p.238

Study on Deposition of Amorphous DLC-Si Films by RF-PECVD
p.244

Study on the Fast Tool Servo (FTS) with the Stiffness Adjustable
p.248

HomeKey Engineering MaterialsKey Engineering Materials Vol. 552Clitella Magnetorheological Finishing Method and...

Clitella Magnetorheological Finishing Method and Equipment

Abstract:

Clitella magnetorheological finishing is a processing ultra-smooth surface method, which has high processing efficiency and relatively low precision machine tool mechanical structure. This paper introduced processing methods that use a clitella magnetorheological finishing technology to achieve an arbitrary radius of curvature of the spherical optical parts. The paper design the device and use this device to process experiments. The experimental results have shown that this method can process optical parts.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volume 552)

Pages:

227-233

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.552.227

Citation:

Cite this paper

Online since:

May 2013

Authors:

Zhi Qiang Yang, Zhong Da Guo, Wei Guo Liu

Keywords:

Magnetorheological Finishing (MRF), Optical Element, Process Equipment, Process Experiments

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Sang-No Lee1, Jong-Gwan Yook, Sung-Jun Park, etal. Conductor Roughness Reduced Low-Loss Coplanar Waveguides on Low Resistively Silicon by Employing Magnetorheological Finishing[J].IEEE 2005:2151-2154

DOI: 10.1109/mwsym.2005.1517175

Google Scholar

[2] Aric Shorey, William Kordonski, Marc Tricard. Magnetorheological Finishing of large and lightweight optics [J]. Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II .Proceedings of SPIE 2004, Vol. 5533

DOI: 10.1117/12.559814

Google Scholar

[3] S.D. Jacobs，Prokhorov. I .V，Kordonsky .W .I，etal. Magnetorheological finishing: a deterministic process for optics manufacturing[J]. The International Society for Optical Engineering,1995,vol 25（6）:pp.372-382

Google Scholar

[4] Aric Shorey, William Kordonski, Marc Tricard. Magnetorheological Finishing and sub-aperture stitchinginterferometry of large and lightweight optics[J]. Optical Fabrication, Metrology, and Material Advancements for Telescopes.Proceedings of SPIE, 2004, Vol.5494

DOI: 10.1117/12.550997

Google Scholar

[5] CHENG Haobo, FENG Zhijing, WANG Yingwei, etal. Magnetic Bingham fluid-assisted deterministicpolishing for super-smoothsurfaces[J]. Chinese Science Bulletin,2005,vol 50（2）:172-178

DOI: 10.1007/bf02897522

Google Scholar

[6] YANG Zhi-qiang,GUO Zhong-da,LIU Wei-guo, etal. Analysis on "comet tail" phenomenon of area-contact magnetorheological finishing [J]. JOURNAL OF XI'AN TECHNOLOGICAL UNIVERSITY, 2009,29(2):103-107（in Chinese）

Google Scholar

[7] YANG Zhi-qiang,GUO Zhong-da,CHEN Zhi-li, etal. Discusses on a method of Magnetorheological Finishing [J]. Journal of Applied Optics, 2009, 30(3): 500-504. (in Chinese）

Google Scholar