Research on Micro Twin-Bridges Catalytic Combustion Type Kerosene Gas Sensor Technology

Abstract:

Based on the principle of catalytic combustion type gas sensor, a kerosene gas sensor with micro twin-bridge structure is fabricated using silicon micromachining technology. A pair of platinum film resistor is fabricated by film processing, and its nominal resistance is 20Ω at 0°C. The nano-alumina catalytic carrier and noble metal catalyst are coated on the surface of sensitive resistance in order to form the sensitive bridge and compensating bridge. The monolithic integration of catalytic element and compensating element is achieved on the silicon micro twin-bridge for fabrication of kerosene sensor. The simulation result shows that once temperature of one bridge rises to 650K, the other bridge may increases about 10°C. The test on kerosene sensor by calibration device indicates that the sensor can detect the kerosene volume fraction ranging from 0 to 7000×10-6 and the sensor output property is linear.

• Periodical: Key Engineering Materials (Volumes 562-565)
• Pages: 317-321
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.317
• Online since: July 2013
• Authors: Ping Wang, Hong Quan Zhang, Tong Zhang, Bo Ran Wang, Dian Zhong Wen
• Keywords: Catalysis, Kerosene Sensor, Micro Twin-Bridge

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