Study on the Mechanical Properties of DLC Thin Films Doped with Cu

Abstract:

Samples of DLC thin films with different Cu concentration were prepared by using a Cu target and different number of graphite target，or adding a grid before the Cu target. The results show that the hardness and stress decreases with an increase of Cu concentration (below 6.3 at.%). When Cu concentration increases from 6.3 at.% to 17.8 at.%, the hardness and stress keep almost constant, and the friction coefficient increases gradually and slowly, as well as the wear loss.

• Periodical: Key Engineering Materials (Volumes 589-590)
• Pages: 411-415
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.589-590.411
• Online since: October 2013
• Authors: Ni Ren, Dong Cai Zhao, Zhan Ji Ma, Geng Jie Xiao, Sheng Hu Wu
• Keywords: Cu-Doped, DLC, Hardness, Stress, Thin Film

References

[1] Ueng H Y, Guo C T. Diamond-like carbon coatings on microdrill using an ECR-CVD system [J]. Applied Surface Science, Vol. 249 (2005), p.246.

DOI: 10.1016/j.apsusc.2004.12.031

[2] Narayan Roger Jagdish. Pulsed laser deposition of functionally gradient diamondlike carbon–metal nanocomposites [J]. Diamond & Related Materials, Vol. 14(2005), p.1319.

DOI: 10.1016/j.diamond.2004.12.047

[3] Hsieh W P, Wang D Y, Shieua F S. Characterization of the Ti-doped diamond-like carbon coatings on a type 304 stainless steel [J]. J. Vac. Sci. Technol. A, Vol. 17 (1999), p.1053.

[4] Tiana Jingze, Zhang Qing, Zhou Q, et al. Correlation between adhesion of diamond-like carbon film on LiTaO3 substrate and SAW velocity [J]. Surface &Coatings Technology Vol. 198(2005), p.198.

DOI: 10.1016/j.surfcoat.2004.10.103

[5] Bonetti L F, Capote G., Santos L V, et al. Adhesion studies of diamond-like carbon films deposited onTi6Al4V substrate with a silicon interlayer [J]. Thin Solid Films, Vol. 515(2005), p.375.

DOI: 10.1016/j.tsf.2005.12.154

[6] Chen Chun-Chin, Hong Franklin Chau-Nan. Interfacial studies for improving the adhesion of diamond-like carbon films on steel [J]. Applied Surface Science Vol. 243(2005), p.6.

DOI: 10.1016/j.apsusc.2004.09.085

[7] Zhao Dongcai, Ren Ni. The methods of reducing intrinsic stress of superhard diamond-like carbon films[J]. Vacuum and Cyrogenics, Vol. 12(2006), p.1.

[8] Ren Ni, Ma Zhanji, Li Bo et al., Characterization of Diamond-Like Carbon Films on NiTi Alloy Biomaterials Surface[J]. Vacuum and Cyrogenics, Vol. 10 (2004), p.137.

[9] Abner Brenner, Aeymour Senderoff, Calculation of stress in electrodeposits from the curvature of plated strip [J]. J. Research NBS Vol. 42(1949), p.105.

DOI: 10.6028/jres.042.009

[10] Uglova V V, Anishchik V M, Pauleau Y, et al. Relations between deposition conditions, microstructure and mechanical properties of amorphous carbon-metal films [J]. Vacuum 2003, Vol. 70(2003), p.181.

DOI: 10.1016/s0042-207x(02)00639-5

[11] Weia Q, Narayan R J, Sharma A K, et al. Preparation and mechanical properties of composite diamond-like carbon thin films [J]. J Vac Sci Technol A, Vol. 17(1999), p.3406.