Demonstration of Thermo-Optic Switch Consisting of Mach-Zehnder Polymer Waveguide Drawn Using Focused Proton Beam

Kenta Miura; Hiromu Kiryu; Yusuke Ozawa; Atsushi Kubota; Yuji Hiratani; Osamu Hanaizumi; Takahiro Satoh; Yasuyuki Ishii; Masashi Kohka; Katsuyoshi Takano; Takeru Ohkubo; Akiyoshi Yamazaki; Wataru Kada; Akihito Yokoyama; Tomihiro Kamiya

doi:10.4028/www.scientific.net/KEM.596.134

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 596Demonstration of Thermo-Optic Switch Consisting of...

Demonstration of Thermo-Optic Switch Consisting of Mach-Zehnder Polymer Waveguide Drawn Using Focused Proton Beam

Abstract:

We demonstrated a PMMA-based thermo-optic switch consisting of a Mach-Zehnder (MZ) type waveguide drawn by proton beam writing (PBW) and working at λ = 1.55 μm. The MZ waveguide was drawn by symmetrically coupling two Y junctions with a core width of 8 μm and a branching angle of 2°. A Ti thin-film heater and Al electrodes were formed on the surface of the MZ waveguide using conventional photolithography and wet-etching processes. An ON/OFF ratio of 9.0 dB and a switching power of 43.9 mW were obtained from the sample. The switching power is lower than for conventional commercial silica-based switches.

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Periodical:

Key Engineering Materials (Volume 596)

Pages:

134-138

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.596.134

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Online since:

December 2013

Authors:

Kenta Miura, Hiromu Kiryu, Yusuke Ozawa, Atsushi Kubota, Yuji Hiratani, Osamu Hanaizumi, Takahiro Satoh, Yasuyuki Ishii, Masashi Kohka, Katsuyoshi Takano, Takeru Ohkubo, Akiyoshi Yamazaki, Wataru Kada, Akihito Yokoyama, Tomihiro Kamiya

Keywords:

Mach-Zehnder Waveguide, PMMA, Proton Beam Writing, Thermo-Optic Switch

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