Gold and Silver Contacts on Tin Oxide Thin Films Produced by Spray Pyrolysis on SiO₂ Substrates

Abstract:

Thin layers of tin oxide have numerous applications in various branches of microelectronics as transparent conductors and active elements in chemical sensors. While forming different metallic contacts to these layers are required for different applications, noble metals are of particular use in gas sensor fabrication as these devices operate at elevated temperatures and harsh environments. The background literature on the quality and electronic features of gold and silver contacts on SnO₂ layers is limited. Moreover, it has been shown that both gold and silver electrodes exhibit different electronic features on TiO₂ at different thermal and atmospheric conditions. Here, we report the I-V characteristics of Au/SnO₂ and Ag/SnO₂ contacts formed on SnO₂ layers deposited on SiO₂ substrates by ultrasonic spray pyrolysis. The obtained I-V plots proved the ohmicity of the Au/SnO₂ and Ag/SnO₂ contacts to be independent from the temperature, in the range of 300-700 K, and the composition of the surrounding atmosphere.

• Periodical: Key Engineering Materials (Volume 605)
• Pages: 515-518
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.605.515
• Online since: April 2014
• Authors: Saeed Moghadam, Navid Alaei-Sheini, Shahin Bagherpour
• Keywords: Gas Sensor, Gold, Ohmic Contact, Schottky Barrier, Silver, TiN Oxide, Transparent Conductor

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