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HomeKey Engineering MaterialsKey Engineering Materials Vol. 616Highly (004)-Oriented Texture of γ-LiAlO2 Films by...

Highly (004)-Oriented Texture of γ-LiAlO₂ Films by Laser Chemical Vapor Deposition

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Abstract:

(004)-oriented γ-LiAlO₂ films were prepared on poly-crystalline AlN substrates by laser chemical vapor deposition at deposition temperature (T_dep) of 1100–1250 K, molar ratio of Li/Al (R_Li/Al) of 1.0–10 and low total pressure (P_tot) of 100–200 Pa. The (004)-oriented γ-LiAlO₂ films consisted of pyramidal grains with a columnar structure. The deposition rate of (004)-oriented γ-LiAlO₂ films reached to 65–72 μm h^-1.

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Key Engineering Materials (Volume 616)

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141-144

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.616.141

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Online since:

June 2014

Authors:

Chen Chi*, Hirokazu Katsui, Rong Tu, Takashi Goto

Keywords:

Faceted Texture, Laser CVD, Microstructure, Orientation

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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