Optimal Design of Piezoelectric Actuator for Precision Positioning Applications

Abstract:

Recent advances in measurement systems require positioning systems with high stiffness, accuracy and speed. Piezoelectric actuators which are featured with mechanical simplicity, quick response, and electromagnetic immunity, are often used in precision positioning. It is known that piezoelectric actuators can achieve high positioning accuracy by the stepping mode but low speed. By contrast, the resonance vibration mode will offer high positioning speed, but sacrifices the high inherent position resolution. For the stepping mode, the displacement of the piezoelectric actuator significantly affects the speed, of which larger displacement induces higher speed. For the resonance vibration mode, an elliptical motion of the piezoelectric actuator tip is generated by horizontal and vertical eigenmodes, and the optimal efficiency can be achieved when the two eigenmodes are operated at the same frequency. For the applications of high positioning accuracy and speed, a piezoelectric actuator should be designed by taking these two operation modes into consideration simultaneously. Based on these requirements, the optimal structural dimensions of a piezoelectric actuator are obtained using a genetic algorithm.

• Periodical: Key Engineering Materials (Volume 625)
• Pages: 224-229
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.625.224
• Online since: August 2014
• Authors: Lien Kai Chang*, Mi Ching Tsai
• Keywords: Genetic Algorithm (GA), Piezoelectric Actuator, Precision Position Stage

References

[1] W.V. Vijver, D. Reynaerts, H.V. Brussel, Design and control of a novel piezoelectric drive module for application in a multi-DOF positioning stage, Proceedings of ISMA. (2006) 169-180.

DOI: 10.1109/ultsym.2006.54

[2] H.V. Brussel, W.V. Vijver, M.D. Volder, S. Devos, D. Reynaerts, A fast, high-stiffness and high-resolution piezoelectric motor with integrated bearing and driving functionality, CIRP Annals-Manufacturing Technology. 55/1 (2006) 373-376.

DOI: 10.1016/s0007-8506(07)60438-7

[3] R. Le Letty, F. Claeyssen, N. Lhermet, P. Bouchilloux, A new amplified piezoelectric actuator for precise positioning and active damping, Proceedings of SPIE. 3041 (1997) 496-504.

DOI: 10.1117/12.275673

[4] K. Uchino, Piezoelectric ultrasonic motors: overview. Smart Mater. Struct. 7 (1998) 273-285.

DOI: 10.1088/0964-1726/7/3/002

[5] L. Petit, R. Briot, P. Gonnard, A multi-mode piezomotor using a flextensional coupler, Smart Mater. Struct. 8 (1999) 167-174.

DOI: 10.1088/0964-1726/8/2/001

[6] S.T. Ho, Characteristics of the linear ultrasonic motor using an elliptical shape stator, Jpn. J. Appl. Phys. 45 (2006) 6011-6013.

DOI: 10.1143/jjap.45.6011

[7] S. Sherrit, C.M. Jones, J.B. Aldrich, C. Blodget, X. Bao, M. Badescu, and Y. Bar-Cohen, Multilayer piezoelectric stack actuator characterization, Proceedings of SPIE. 6929 (2008) 692909-1-692909-12.

DOI: 10.1117/12.776396

[8] S. Devos, M.D. Volder, D. Reynaerts, H.V. Brussel, A piezoelectric drive combining a resonant and a stepping positioning mode. In Int. Topical Conf. on Precision Engineering, Micro Technology, Measurement Techniques and Equipment, (2003) 109-112.