The Spatial Synchronization of Areal Measurement Data Sets by Multi-Probes

Dong Hyeok Lee; Min Gyu Kim; Nahm Gyoo Cho

doi:10.4028/www.scientific.net/KEM.625.346

Paper Titles

Length Traceability Using Optical Frequency Comb
p.322

Measurement of Step Height Using White Light Spectral Interferometry
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Study on Chemical Interaction Analysis of Reactive Fullerenol Molecules in Cu-CMP Using High-Sensitive Raman Spectroscopy
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The Assembly and Measurement of Corrector Lens of a Cassegrain Telescope
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The Spatial Synchronization of Areal Measurement Data Sets by Multi-Probes
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Binder-Free Green Composite Using Bamboo Fibers Extracted with a Machining Center-Investigation of Optimal Bamboo Fiber Length
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Development of a CAM System with Linear Servo Motor for Automation of Metal Hammering
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High Efficiency AGV Transportation System Based on Knowledge of Taxis: Strategy for AGV Behavior at Intersections
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High Efficiency Tool Path Generation for Freeform Surface Machining Based on NURBS Subdivision
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 625The Spatial Synchronization of Areal Measurement...

The Spatial Synchronization of Areal Measurement Data Sets by Multi-Probes

Abstract:

In this paper, to release this induced errors and improve the accuracy of the measured data, a new spatial synchronization method is proposed to spatially synchronize the three-dimensional surface data sets obtained by variety surface topography measuring instruments. The proposed spatial synchronization method minimizes the geometrical error components using the data interpolation, the least squares method, and the two-dimensional cross correlation function. For verification of the method, it was applied to the measured data sets measured with a chromatic confocal microscopy, a laser scanning confocal microscopy, and an ellipsometer. Based on the experimental results, the accuracy or the proposed method is analyzed and evaluated.

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Periodical:

Key Engineering Materials (Volume 625)

Pages:

346-351

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.625.346

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Online since:

August 2014

Authors:

Dong Hyeok Lee, Min Gyu Kim, Nahm Gyoo Cho*

Keywords:

Multi-Probes, Sensor Fusion, Spatial Synchronization, Surface Areal Measurement, Surface Stitching

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* - Corresponding Author

References

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