Identifying the Microtopographic Features Generated by Different Ultra-Precision Machining Techniques by Power Spectral Density

Jian Chao Chen; Tao Sun

doi:10.4028/www.scientific.net/KEM.625.73

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High Speed Machining of Difficult-to-Machine Materials under Different Lubrication Conditions
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High-Accuracy Calibration of CMM Using Temporal-Coherence Fiber Interferometer with Fast-Repetition Comb Laser
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Identifying the Microtopographic Features Generated by Different Ultra-Precision Machining Techniques by Power Spectral Density
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Metrology for Comparison of Displacements at the Picometer Level
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Study on Dynamic Measurement of Plane Distance
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 625Identifying the Microtopographic Features...

Identifying the Microtopographic Features Generated by Different Ultra-Precision Machining Techniques by Power Spectral Density

Abstract:

An atomic force microscope (AFM) was used to image the ultra-precision machined surfaces of K9 glasses, potassium dihydrogen phosphate (KDP) crystals, and silicon wafers. Each surface was generated by two machining techniques: (1) coarse-grain-sized diamond wheel grinding and regular polishing were used on K9 glasses; (2) single-point diamond turning and deliquescent polishing were performed on KDP crystals; (3) standard chemical mechanical polishing and atmospheric pressure low temperature plasma polishing were employed on silicon wafers. One-dimensional and two-dimensional power spectral densities (PSDs) of each sample surface were calculated from the measurement data. The influence of each machining process on the sample surface texture was analyzed based on the PSDs. The experiment results indicate that the power spectral density is a great guidance for the selection and improvement of ultra-precision machining techniques.

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Periodical:

Key Engineering Materials (Volume 625)

Pages:

73-78

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.625.73

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Online since:

August 2014

Authors:

Jian Chao Chen, Tao Sun*

Keywords:

Atomic Force Microscopy (AFM), Power Spectral Density, Surface Roughness (SR), Ultra-Precision Machining Technique

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