Study of Air Temperature Correction for Optical Path Based on Large-Scale Laser Comparator

Jian Shuang Li; Xiao Rong Huang; Ming Zhao He; Lian Fu Li

doi:10.4028/www.scientific.net/KEM.625.85

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 625Study of Air Temperature Correction for Optical...

Study of Air Temperature Correction for Optical Path Based on Large-Scale Laser Comparator

Abstract:

Large-scale comparators of over 30m range are traceable devices of dimensional measurement in advance large-scale manufacture domain. High precision large-scale laser comparator is an open air laser interferometric measurement device, mainly made up of length measurement system, guiding rail system and control system. The length measurement system use laser interference system to get displacements, the main source of the measurement uncertainty of displacements comes from the air temperature measurement uncertainty. This paper put forward a novel air temperature compensation method by weighting-section compensation in the large-scale laser comparator optical path. The method can improve the length measurement uncertainty of large-scale laser comparator to 2×10^-8 level with changing the hardware of air temperature measurement system.

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Periodical:

Key Engineering Materials (Volume 625)

Pages:

85-90

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.625.85

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Online since:

August 2014

Authors:

Jian Shuang Li*, Xiao Rong Huang, Ming Zhao He, Lian Fu Li

Keywords:

Large-Scale Metrology, Laser Comparator, Laser Interferometric, Uncertainty

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