Long Range Ordering of 5-nm-Sized Dot Arrays with a Pitch of <10 nm along EB-Drawn Guide Lines Using PS-PDMS Self-Assembly

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We demonstrate the possibility of forming long-range-ordered self-assembled nanodot arrays with dots size of 5 nm and pitches of 10×7.5 nm2 using guide line templates and low molecular weight (MW) (4,700–1,200 g/mol) poly (styrene)-poly (dimethylsiloxane) (PS-PDMS) for application in ultrahigh density patterned media. The self-assembled PDMS nanodots are controlled in a long range by varying the heights and gaps of the guide lines. Adopting the 14-nm-high resist guide lines with suitable gaps, the 5-nm-sized and 10×7.5 nm2-pitched self-assembled nanodots were ordered in maximum 7 dot arrays with long-range order. The experimental results demonstrate that the method is possible for achieving patterned media with magnetic recording densities of 8.6 Tbit/in.2 using low MW PS-PDMS and slim guide lines.

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May 2015

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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[1] S. O. Kim, H. H. Solak, M. P. Stoykovich, N. J. Ferrier, J. J. De Pablo, and P. F. Nealey, Nature 424, 411 (2003).

DOI: 10.1038/nature01775

Google Scholar

[2] R. Ruiz, H. M. Kang, F. A. Detcheverry, E. Dobisz, D. S. Kercher, T. R. Albrecht, J. J. De Pablo, and P. F. Nealey, Science 321, 936 (2008).

DOI: 10.1126/science.1157626

Google Scholar

[3] W. I. Park, K. Kim, H. I. Jang, J. W. Jeong, J. M. Kim, J. Choi, J. H. Park, and Y. S. Jung, Small 8, 3762 (2012).

Google Scholar

[4] I. Bita, J. K. W. Yang, Y. S. Jung, C. A. Ross, E. L. Thomas, and K. K. Berggren, Science. 321, 939-943 (2008).

Google Scholar

[5] M. Sakurai, Y. Kamata, and H. Hieda, Toshiba Rev. 57, 52-55 (2002).

Google Scholar

[6] S. Hosaka, T. Akahane, M. Huda, H. Zhang, and Y. Yin, ACS Appl. Mater. Interfaces 6 (2014) 6208.

Google Scholar

[7] N. Kihara, R. Yamamoto, N. Sasao, T. Shimada, A. Yuzawa, T. Okino, Y. Ootera, Y. Kamata, and A. Kikitsu, J. Vac. Sci. Technol. B 30, 06FH02-1-5 (2012).

DOI: 10.1116/1.4763356

Google Scholar

[8] A. N. Semenov, Sov. Phys. JETP 61, 733 (1985).

Google Scholar

[9] M. Huda, J. Liu, Y. Yin and S. Hosaka, Jpn. J. Appl. Phys., Part 1 51, 06FF10 (2012).

Google Scholar

[10] H. Zhang, S. Hosaka and Y. Yin, Appl. Phys. Lett. 104, 093107 (2014).

Google Scholar