Anisotropic Co-Hf Thin Films for Micro-Sensors and Micro-Transducers

V. Madurga; C. Favieres; J. Vergara

doi:10.4028/www.scientific.net/KEM.644.65

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 644Anisotropic Co-Hf Thin Films for Micro-Sensors and...

Anisotropic Co-Hf Thin Films for Micro-Sensors and Micro-Transducers

Abstract:

Thin films of Co-Hf (≈ 86-14 % at.) were grown over Si micro-cantilevers using a glancing-angle deposition technique. A controlled easy direction of magnetisation (anisotropy field μ_oH_k ≈ 0.1 T) in the longitudinal or in the transverse direction of the micro-cantilevers was generated. The mechanical properties of the films under the action of a magnetic field were opposite depending on the magnetisation’s easy direction: i) their deflection was either zero or the maximum value depending on the direction of the applied magnetic field with respect to the parallel or transverse easy direction of magnetisation; ii) the shift in the resonance frequency under a longitudinal or transverse magnetic field was also different depending on the longitudinal or transverse easy direction of magnetisation. The use of these coated devices with micromagnet-like films for sensors and transducers is discussed.

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Key Engineering Materials (Volume 644)

Pages:

65-69

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.644.65

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Online since:

May 2015

Authors:

V. Madurga, C. Favieres, J. Vergara

Keywords:

Magnetic Anisotropy, Micro-Cantilevers, Micro-Sensors, Micro-Transducers, Nanomorphology, PLD Co-Hf Thin Films

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