A Novel Micro-Machined Out-of-Plane Resonant Accelerometer with Differential Structure of Different-Height Resonant Beams

Shu Ming Zhao; Yun Feng Liu; Jing Xin Dong

doi:10.4028/www.scientific.net/KEM.645-646.488

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646A Novel Micro-Machined Out-of-Plane Resonant...

A Novel Micro-Machined Out-of-Plane Resonant Accelerometer with Differential Structure of Different-Height Resonant Beams

Abstract:

A novel micro-machined out-of-plane resonant accelerometer with a differential structure is presented. The micro-machined accelerometer consists of two identical torsional structures with asymmetric mass distribution, torsion beam and two different-height resonant beams. Due to the asymmetric mass distribution, the two mirror-symmetrical-placed torsional structures turn an angle under an out-of-plane acceleration, which makes the different-height resonant beam connected to the structures bear different axial stresses, outputting a differential resonant frequency shift. A multi-layer mask etching process based on silicon-on-glass micro-machined technology was employed to fabricate the differential structure and the different-height resonant beams. Primary experiment shows the differential sensitivity of out-of-plane acceleration is 32Hz/g at the resonant frequency of 21.41 kHz.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

488-491

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.488

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Online since:

May 2015

Authors:

Shu Ming Zhao, Yun Feng Liu, Jing Xin Dong*

Keywords:

Different-Height Resonant Beams, Multi-Layer Mask Etching Process, Out-of-Plane Accelerometer, Silicon-on-Glass

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References

[1] George T. Schmidt, INS/GPS Technology Trends, (2011).

Google Scholar

[2] Ralph Hopkins, Joseph Miola, Roy Setterlund, et al. The Silicon Oscillating Acclerometer: A high-performance MEMS accelerometer for precision navigation and strategic guidance applications, Draper Technology Degist, 10 (2006), 6-15.

Google Scholar

[3] Burrer C., Esteve J, A novel resonant silicon accelerometer in bulk-micromachining technology, Sens. Actuators A, 46-47 (1995), 185-189.

DOI: 10.1016/0924-4247(94)00887-n

Google Scholar

[4] Junbo Wang, Yanlong Shang, Jian Chen, et al. Micro & Nano Letters, 7 (2012), 1230-1233.

Google Scholar

[5] Shang Y. L, Wang J. B, Tu S, Liu L, Chen D. Y: Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity, Micro Nano Letter, 6 (2011), 519-522.

DOI: 10.1049/mnl.2011.0129

Google Scholar

[6] Dong jingxin, Micro-inerial instrument--Micro-accelerometers, Tsinghua University Publishing Co., (2003).

Google Scholar

[7] X.S. Liu, Z.C. Yang, X.Z. Chi, et al. A doubly decoupled lateral axis micromachined gyroscope, Sensors and Actuators A, 154 (2009) 218-223.

DOI: 10.1016/j.sna.2008.10.015

Google Scholar