Study on a Planar Interdigitated MEMS Supercapacitor Using Modeling and Simulation Method

Ke Ren Dai; Xiao Feng Wang; Wu Shuang Lv; Zheng You

doi:10.4028/www.scientific.net/KEM.645-646.513

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646Study on a Planar Interdigitated MEMS...

Study on a Planar Interdigitated MEMS Supercapacitor Using Modeling and Simulation Method

Abstract:

In this paper, a modeling and simulation method for planar interdigitated ruthenium oxide MEMS supercapacitor was proposed based on the electrochemical reaction mechanism of supercapacitor. The study simulated the planar interdigitated ruthenium oxide MEMS super capacitor using Comsol software. The highly accurate charge and discharge curves of the super capacitor, electric potential distribution graph and the concentration distribution graph were got through simulation. The effects of two structure-parameters were discussed in the research.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

513-516

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.513

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Online since:

May 2015

Authors:

Ke Ren Dai, Xiao Feng Wang*, Wu Shuang Lv, Zheng You

Keywords:

Interdigitated, MEMS, Simulation, Supercapacitor

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* - Corresponding Author

References

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