The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110

Hui Jun Yu; Zi Qiao Ding; Xiao Ping He; Lian Ming Du; Hao Qu; Wu Zhou; Bei Peng

doi:10.4028/www.scientific.net/KEM.645-646.528

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646The Research on MEMS Micro Capacitance Sensor...

The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110

Abstract:

A universal capacitive readout integrated circuit MS3110 is used to measure capacitances in micro capacitance sensor. The configuration, operating principle and process of MS3110 are introduced and a method of programming the inner register on-chip with STM32 is presented with the control block diagram. Performance of MS3110 has been tested by the inner adjust capacitance. A comb micro accelerometer is designed and manufactured. A tentative equivalent electric model of accelerometer is built according to a series of capacitance tests, and the influence of parasitic capacitance in accelerometer system is discussed.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

528-532

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.528

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Online since:

May 2015

Authors:

Hui Jun Yu, Zi Qiao Ding, Xiao Ping He, Lian Ming Du, Hao Qu, Wu Zhou, Bei Peng*

Keywords:

Equivalent Electric Model, MEMS Capacitance Sensor, MS3110, Universal Capacitive Readout Integrated Circuit

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* - Corresponding Author

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