High Resolution Micro-Displacement Sensing Circuit for Rotor Micro-Gyroscope

Abstract:

A novel CMOS interface circuit with high resolution is designed and realized to achieve the integration of interface circuit for liquid suspended rotor micro-gyroscope. The detecting circuit adopts continuous-time current sensing circuit for capacitance measurement. The equivalent output noise power spectral density of phase-sensitive demodulation is 120 nV/Hz1/2. The whole circuitry is realized with 0.5 μm 2P2M CMOS process and its testing results show the circuit has a relative capacitance resolution of 1×10-8, in which the power supply is 18 V and the power consumption is 30 mW. The area of the chip is merely 18.5 mm2.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 538-542
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.538
• Online since: May 2015
• Authors: Ming Yuan Ren*, Xiao Wei Liu, Hai Feng Zhang, Zhi Gang Mao
• Keywords: Capacitance Detection, CMOS Integrated Circuit, Gyroscope, Suspended Rotor

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