Advancements in Micro-Structure with Multiple Stress Concentration Region for Bionic Vector Hydrophone

Abstract:

The method of Multiple Stress Concentration Regions (MSCRs) on the surface of MEMS Silicon micro-structure is introduced in order to enhance the sensibility of the hair vector hydrophone without reducing the working bandwidth. The MSCRs with the thickness and width smaller than the rest of the cantilever can produce localized stress concentration when constant force is applied on the structure. ANSYS software has been used as a tool to analyze the effect of different shapes and dimensions on the performance of the micro-structure. The optimum MSCR has been obtained. Results show that compared with the ordinary structure, the sensitivity of the micro-structure with MSCR can be increased by 1.5 times, and the upper limit of bandwidth can be improved from 337Hz to 500Hz. This paper provides a new method to resolve contradiction between the sensitivity and working bandwidth.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 555-560
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.555
• Online since: May 2015
• Authors: Guo Jun Zhang, Peng Zhao, Wen Dong Zhang*
• Keywords: ANSYS, MEMS, Stress Concentration, Vector Hydrophone

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