FPGA-Based Test Equipment for System-Level MEMS Switch Series

Peng Liu; Wen Zhong Lou; Yu Fei Lu; Xin Yu Feng

doi:10.4028/www.scientific.net/KEM.645-646.572

Paper Titles

Design of 16 bit 200kHz Feedforward Sigma-Delta ADC Applied in Silicon Gyroscope
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Advancements in Micro-Structure with Multiple Stress Concentration Region for Bionic Vector Hydrophone
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High-Precision Quadrature Signal Generator for Digital Demodulation of MEMS Gyroscope
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Study of Thin Film Pressure Sensor by Magnetron Sputtering
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FPGA-Based Test Equipment for System-Level MEMS Switch Series
p.572

Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8
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Passive Wireless Multi-Parameter Sensor System for Hermetic Environment Monitoring
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Statistical Analysis and Yield Enhancement of MEMS Devices by Considering Multi-Process Variations
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Effects of Hall Output Probes Shape on Magnetic Characterization of Hall Magnetic Field Sensor Based on MOSFET
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646FPGA-Based Test Equipment for System-Level MEMS...

FPGA-Based Test Equipment for System-Level MEMS Switch Series

Abstract:

A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

572-576

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.572

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Online since:

May 2015

Authors:

Peng Liu*, Wen Zhong Lou, Yu Fei Lu, Xin Yu Feng

Keywords:

FPGA, MEMS Switch Series, Test Equipment System, Testing Algorithms

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* - Corresponding Author

References

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