Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8

Abstract:

In this paper, a new capacitive micromachined ultrasonic transducer (CMUT) is designed by using SU-8 material, and the theory of elastic thin plate is used to deduce the relationship between the pressure and capacitance of the structure. Simulation has been done about SU-8 CMUT by finite element method software ANSYS. The deformation of CMUT under acoustic pressure, the relationship between frequency, thickness and sensitivity, as well as the acoustic impedance and reflection coefficient of SU-8 material also have been studied through the simulation. The results turn out that SU-8 has the advantages of big dynamic range, high sensitivity and small acoustic impedance, so it has broad application in the ultrasonic field.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 577-582
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.577
• Online since: May 2015
• Authors: Yu Ping Li, Chang De He, Juan Ting Zhang, Jin Long Song, Wen Dong Zhang, Chen Yang Xue*
• Keywords: Capacitive Membrane, CMUT, Finite Element Method (FEM), SU-8

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