Changes in Surface Morphology, Deflection and Wear of Microcrystalline Diamond Film Observed during Sliding Tests against Si3N4 Balls

Andrei Bogatov; Rainer Traksmaa; Vitali Podgursky

doi:10.4028/www.scientific.net/KEM.674.145

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 674Changes in Surface Morphology, Deflection and Wear...

Changes in Surface Morphology, Deflection and Wear of Microcrystalline Diamond Film Observed during Sliding Tests against Si₃N₄ Balls

Abstract:

The study investigates alterations in surface morphology of microcrystalline diamond (MCD) film under reciprocating sliding test conditions. The MCD film was grown by microwave plasma enhanced chemical vapor deposition (MW-PECVD) on (100)-oriented Si wafer. The surface morphology was characterized by optical microscopy, scanning electron microscopy (SEM), atomic force microscopy (AFM) and mechanical profilometry. The formation of ripples on the wear scar surfaces was observed. The normalized wear rate (mm³/mN) of diamond film was evaluated using different approaches in order to understand the influence of diamond film deflection to wear.

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Key Engineering Materials (Volume 674)

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145-151

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https://doi.org/10.4028/www.scientific.net/KEM.674.145

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Online since:

January 2016

Authors:

Andrei Bogatov*, Rainer Traksmaa, Vitali Podgursky

Keywords:

Cavities, MCD Films, Ripples, Wear Rate

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References

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