Growth of Nanostructure TiO₂ Films by Glancing Angle Deposition

Abstract:

Nanostructure TiO₂ films were prepared by electron beam evaporation with glancing angle deposition technique at room temperature. The morphology, crystal structure and optical properties at various substrate rotation speeds (0-10 rpm) were investigated by field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD) and UV-vis spectrophotometer. The cross-section FE-SEM images illustrate that the nanostructures consist of different morphology: slanted columnar, spiral and vertical align nanorods at 0, 0.01 and 10 rpm-rotation speed, respectively. In particular, the rotation speed-controlled incoming vapor flux was found to play crucial role in the growth of nanostructure TiO₂ films.

• Periodical: Key Engineering Materials (Volumes 675-676)
• Pages: 289-292
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.675-676.289
• Online since: January 2016
• Authors: Theerayuth Plirdpring*, Mati Horprathum, Pitak Eiamchai, Benjarong Samransuksamer, Chanunthorn Chananonnawathorn, T. Boonpichayapha, Jakrapong Kaewkhao
• Keywords: Evaporation, Glad, Titanium Dioxide

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