Effect of the SF₆ Flow Injection Time on the Formation of the Carbon Coils

Abstract:

Carbon coils could be synthesized using C₂H₂/H₂ as source gases and SF₆ as an incorporated additive gas under thermal chemical vapor deposition system. Bunch-type large-sized (100 ~ 200 μm in diameter) Ni grains were used as the catalyst for the formation of the carbon coils. According to the different reaction processes, the injection time of SF₆ gas flow was varied from 1.0 min to 60 min. The characteristics (formation density, morphology, and geometry) of the deposited carbon coils on the substrates were investigated according to the different reaction processes. Finally, both the high production yield of carbon coils and their geometry control could be achieved merely by manipulating SF₆ gas flow injection time. Two cases growth patterns were proposed according to SF₆ gas flow injection time in association with the fluorine’s characteristics for etching the materials or enhancing the nucleation sites.

• Periodical: Key Engineering Materials (Volume 689)
• Pages: 48-54
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.689.48
• Online since: April 2016
• Authors: Jae Kyung Lee, Sung Hoon Kim*
• Keywords: Geometry Control, Linear Type Carbon Microcoils, Manipulation of SF₆ Incorporation Time, Thermal Chemical Vapor Deposition

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