[1]
I.D. Marinescu, E. Uhlmann and T.K. Doi: Handbook of Lapping and Polishing (CRC Press, USA 2007).
Google Scholar
[2]
Y.B. Tian, Z.W. Zhong and J.H. Ng: Int. J. Precis. Eng. Manuf. Vol. 14(8) (2013), p.1447.
Google Scholar
[3]
Y.W. Zhu, J. Wang, J. Li and K. Lin: China Mech. Eng. Vol. 20 (2009), p.723.
Google Scholar
[4]
X. Wang and X. Zhang: Appl. Opt. Vol. 48(5) (2009), p.904.
Google Scholar
[5]
P. van der Velden: Microelectron. Eng. Vol. 50(99) (2001), p.41.
Google Scholar
[6]
L.B. Zhou, H. Eda and J. Shimizu: J. Mater. Process. Tech. Vol. 129 (2002), p.34.
Google Scholar
[7]
J.Y. Choi and H.D. Jeong: Int. J. Mach. Tool. Manu. Vol. 44(11) (2004), p.1163.
Google Scholar
[8]
H. Kim, S. Lee, H. Jeong and D.A. Dornfeld: J. Electrochem. Soc. Vol. 151(12) (2004), p.858.
Google Scholar
[9]
T. Fletcher, F. Gobena and V. Romero: OSA Optical Fabrication and Testing Topical Meeting (New York, USA 2004).
Google Scholar
[10]
S.Y. Luo and K.C. Chen: J. Mater. Process. Tech. Vol. 209(2) (2009), p.686.
Google Scholar
[11]
J. Li, Y.W. Zhu, D.W. Zuo, K. Lin and M. Li: Key. Eng. Mater. Vol. 426-427 (2010), p.589.
Google Scholar
[12]
J. Li, B. Li, Z.G. Hu, Y.W. Zhu and D.W. Zuo: Integr. Ferroelectr. Vol. 152(1) (2014), p.43.
Google Scholar
[13]
J. Li, P. Gao, Y.W. Zhu, B. Li, Y.L. Sun and D.W. Zuo: Key. Eng. Mater. Vol. 487 (2011), p.253.
Google Scholar
[14]
Y.B. Tian, Z.W. Zhong and S.T. Lai: Int. J. Adv. Manuf. Tech. Vol. 68(5–8) (2013), p.993.
Google Scholar
[15]
Z.C. Lin and R.Y. Wang: Int. J. Adv. Manuf. Tech. Vol. 74(1-4) (2014), p.25.
Google Scholar
[16]
Z.H. Dai, Y.W. Zhu, J. Lin, P. Gao and D.W. Zuo: Diamond & Abrasives Engineering. Vol. 5 (2014), p.6.
Google Scholar
[17]
S. Agarwal, P.V. Rao: Int. J. Mach. Tool. Manu. Vol. 48(6) (2008), p.698.
Google Scholar
[18]
J.Q. Gao, J. Chen, G.L. Liu, Y.J. Yan, X.J. Liu and Z.R. Huang: Wear. Vol. 270(1-2) (2010), p.88.
Google Scholar
[19]
H.B. Cheng, Z.C. Dong, X. Ye and H.Y. Tam: Opt. Express. Vol. 22(15) (2014), p.18588.
Google Scholar