Tribology Properties of IGZO Films by the Sliding Contacts of Reciprocating Motion

Tse Chang Li; Ching Lin Hsiao; Yu Ching Chiang; Jen Fin Lin

doi:10.4028/www.scientific.net/KEM.739.68

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Tribology Properties of IGZO Films by the Sliding Contacts of Reciprocating Motion

Abstract:

In the present study, sliding tribo tests with reciprocating motion were carried out to simulate the thumb-driven wear arising in indium gallium zinc oxide (IGZO) specimens prepared at five inclination angles during film deposition. Frictional and normal forces, F_x and F_y, and vibrations were used to analyze energy dissipation (ΔW) and composite mean force fluctuation intensities (IF_SS). Friction coefficient is lowered by decreasing the mean surface roughness (R_a); its increase can raise ΔW. The friction coefficients of samples prepared with a nonzero inclination angle were lower than that of the IGZO_0° specimen.