The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating

Elena S. Parfenova

doi:10.4028/www.scientific.net/KEM.743.138

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The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating
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The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating

Abstract:

The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown.

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Periodical:

Key Engineering Materials (Volume 743)

Pages:

138-141

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.743.138

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Online since:

July 2017

Authors:

Elena S. Parfenova*

Keywords:

Coating, Deformation, Diffusion, Elastic Wave, Mathematical Model, Stress

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