Deposition of a Diamond-Like-Carbon Film by Ion Plating and Investigation on its Adhesiveness

Xia Zhu; Kasuki Kubo; Hiromichi Toyota; Shinfuku Nomura; Yukiharu Iwamoto; Pria Gautama

doi:10.4028/www.scientific.net/KEM.749.70

Paper Titles

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Wet Core Drilling of CFRP with an Electrodeposited Diamond Core Drill - Effects of Cutting Conditions on Chip Evacuation and Core Jamming
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Property and Recyclability Change of Corrosion-Inhibition-Improved Amine-Free Water-Soluble Cutting Fluid with Repeated Recycling
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Deposition of a Diamond-Like-Carbon Film by Ion Plating and Investigation on its Adhesiveness
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Basic Characteristics of In-Liquid Plasma Jet and Electrode Damage
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Micro Milling on Thin Wire
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Influence of Coolant Application Direction on the Cutting Performance of Ceramic Tool in High-Speed Air-Jet-Assisted Machining of Inconel 718
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Study on Tool Wear In-Process Estimation for Ball End Mill Using Rotation Control Air Turbine Spindle
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 749Deposition of a Diamond-Like-Carbon Film by Ion...

Deposition of a Diamond-Like-Carbon Film by Ion Plating and Investigation on its Adhesiveness

Abstract:

Diamond-like-carbon (DLC) films are promising as coating materials. Ion plating, an excellent method in terms of adhesiveness, step coverage, and deposition rate, can form not only pure metal films but also oxide films, nitride films, and carbonized films. In this study, which aimed to form a DLC film with good adhesiveness and a diamond crystal structure, a DLC film, with a SiC interlayer formed by ion plating with introduction of tetramethylsilane (TMS), was formed. It was experimentally revealed that as the interlayer thickness increases, the crystal structure in the DLC film becomes more diamond rich, and the adhesiveness of the DLC film and substrate is thereby improved.

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Periodical:

Key Engineering Materials (Volume 749)

Pages:

70-75

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.749.70

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Online since:

August 2017

Authors:

Xia Zhu*, Kasuki Kubo, Hiromichi Toyota, Shinfuku Nomura, Yukiharu Iwamoto, Pria Gautama

Keywords:

Adhesiveness, Diamond-Like Carbon Film, Ion Plating, Metal Subtract, SiC Interlayer

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