Effects of Pitch of Array Punch on the Nanoimprinting

Abstract:

In this study, molecular dynamics (MD) are used to simulate the nanoimprinting behaviors of (001) Ni thin films using 3×3 array cuboid diamond punch. Different pitch of the punches was used to investigate the effect of the interaction among the forming pattern and the quality of the formed holes. Forming force was evaluated including normal and tractional force of the punch during pressing process. The dislocation behavior was also monitoring during the holes forming. The result showed that the pitch of the punch was 2w could get the best forming pattern.

• Periodical: Key Engineering Materials (Volume 823)
• Pages: 21-26
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.823.21
• Online since: September 2019
• Authors: Yuan Ching Lin*, Chen Yuan Hsiao
• Keywords: Array Punch, Molecular Dynamics, Nanoimprinting, Ni Thin Films

References

[1] Information on http://www.ks.uiuc.edu/Research/vmd/.

[2] A.Stukowski: Modelling and Simulation in Materials Science and Engineering Vol.18.1 (2009), 015012.

[3] R.A. Johnson: Physical Review B Vol. 39.17 (1989), p.12554.

[4] R.A. Johnson: Physical Review B Vol. 37.8 (1988), p.3924.

[5] F. Cleri and V. Rosato: Physical Review B Vol. 48.1 (1993), p.22.

[6] G. Mazzone and V. Rosato: Physical Review B Vol. 55.2 (1997), p.837.

[7] P.M. Morse: Physical Review Vol. 34 (1929), p.57.

[8] L.A. Girifalco and V. G. Weizer: Physical Review Vol.114.3 (1959), p.687.

[9] J.M. Haile: Molecular Dynamics Simulation: Elementrary Methods(A Wiley-Interscience Publication, John Wiley & Sons, USA 1992).