Ultra Fine Crystalline Silicon Nitride from a Continuous Gas Phase Plasma Route

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Periodical:

Key Engineering Materials (Volumes 89-91)

Main Theme:

Edited by:

Michael J. Hoffmann, Paul F. Becher and Günther Petzow

Pages:

47-54

DOI:

10.4028/www.scientific.net/KEM.89-91.47

Citation:

T.A. Jennett et al., "Ultra Fine Crystalline Silicon Nitride from a Continuous Gas Phase Plasma Route ", Key Engineering Materials, Vols. 89-91, pp. 47-54, 1994

Online since:

August 1993

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Price:

$35.00

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