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HomeMaterials Science ForumMaterials Science Forum Vols. 105-110Defect Distribution across 6-Inch CZ-Silicon...

Defect Distribution across 6-Inch CZ-Silicon Wafers

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Periodical:

Materials Science Forum (Volumes 105-110)

Pages:

1185-1188

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.105-110.1185

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Online since:

January 1992

Authors:

Werner Puff, Peter Mascher, S.K. Hahn, K.H. Cho, B.Y. Lee

Keywords:

Defect, Doppler, Lifetime, Oxygen-Precipitation, Semiconductor, Silicon

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Сopyright:

© 1992 Trans Tech Publications Ltd. All Rights Reserved

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