Defect Distribution across 6-Inch CZ-Silicon Wafers

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Periodical:

Materials Science Forum (Volumes 105-110)

Edited by:

Zs. Kajcsos and Cs. Szeles

Pages:

1185-1188

Citation:

W. Puff et al., "Defect Distribution across 6-Inch CZ-Silicon Wafers", Materials Science Forum, Vols. 105-110, pp. 1185-1188, 1992

Online since:

January 1992

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