Self-Modulating Incorporation of Sb in Si/SiGe Superlattices during Molecular Beam Epitaxial Growth

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Periodical:

Materials Science Forum (Volumes 117-118)

Edited by:

Tsunemasa Taguchi

Pages:

159-164

DOI:

10.4028/www.scientific.net/MSF.117-118.159

Citation:

K. Fujita et al., "Self-Modulating Incorporation of Sb in Si/SiGe Superlattices during Molecular Beam Epitaxial Growth ", Materials Science Forum, Vols. 117-118, pp. 159-164, 1993

Online since:

January 1993

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$35.00

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