Accurate Evaluation Techniques of the Interstitial Oxygen Concentrations in the Oxygen Precipitated and the Low-Resistivity CZ-Si Crystals

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 117-118)

Edited by:

Tsunemasa Taguchi

Pages:

183-188

Citation:

Y. Kitagawara et al., "Accurate Evaluation Techniques of the Interstitial Oxygen Concentrations in the Oxygen Precipitated and the Low-Resistivity CZ-Si Crystals ", Materials Science Forum, Vols. 117-118, pp. 183-188, 1993

Online since:

January 1993

Export:

Price:

$38.00