Accurate Evaluation Techniques of the Interstitial Oxygen Concentrations in the Oxygen Precipitated and the Low-Resistivity CZ-Si Crystals

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Periodical:

Materials Science Forum (Volumes 117-118)

Edited by:

Tsunemasa Taguchi

Pages:

183-188

DOI:

10.4028/www.scientific.net/MSF.117-118.183

Citation:

Y. Kitagawara et al., "Accurate Evaluation Techniques of the Interstitial Oxygen Concentrations in the Oxygen Precipitated and the Low-Resistivity CZ-Si Crystals ", Materials Science Forum, Vols. 117-118, pp. 183-188, 1993

Online since:

January 1993

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