Characterization of the Interface Ta/GaAs in Schottky Barrier Structures Prepared by Low Energy RF Sputtering with X-Ray Photoemission, TEM and Optical Transmittance Measurements

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Periodical:

Materials Science Forum (Volumes 126-128)

Edited by:

Ph. Komninou and A. Rocher

Pages:

463-466

DOI:

10.4028/www.scientific.net/MSF.126-128.463

Citation:

P. Gladkov et al., "Characterization of the Interface Ta/GaAs in Schottky Barrier Structures Prepared by Low Energy RF Sputtering with X-Ray Photoemission, TEM and Optical Transmittance Measurements ", Materials Science Forum, Vols. 126-128, pp. 463-466, 1993

Online since:

January 1993

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