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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147PL and EPR Studies of Er-Implanted FZ- and CZ-Si

PL and EPR Studies of Er-Implanted FZ- and CZ-Si

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

715-720

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.715

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Online since:

October 1993

Authors:

Hanka Przybylinska, J. Enzenhofer, G. Hendorfer, M. Schoisswohl, L. Palmetshofer, W. Jantsch

Keywords:

EPR, Photoluminescence (PL), Rare Earth Impurities, Si:Er, Silicon

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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