The Interface between Polysilicon and Monocrystalline Silicon: Interface Layer and Electrical Characteristic

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Periodical:

Materials Science Forum (Volumes 155-156)

Edited by:

Y. Limoge and J.L. Bocquet

Pages:

493-510

DOI:

10.4028/www.scientific.net/MSF.155-156.493

Citation:

B. Leroy and T. Vanneste, "The Interface between Polysilicon and Monocrystalline Silicon: Interface Layer and Electrical Characteristic", Materials Science Forum, Vols. 155-156, pp. 493-510, 1994

Online since:

May 1994

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$35.00

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