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HomeMaterials Science ForumMaterials Science Forum Vols. 155-156The Interface between Polysilicon and...

The Interface between Polysilicon and Monocrystalline Silicon: Interface Layer and Electrical Characteristic

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Reactive Phase Formation at Interfaces and Diffusion Processes

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Periodical:

Materials Science Forum (Volumes 155-156)

Pages:

493-510

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.155-156.493

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Online since:

May 1994

Authors:

B. Leroy, T. Vanneste

Keywords:

Carbon, Device Technology, Emitter, Epitaxy, Gain, Interface, Interface Layer, Interface States (or Traps), Life Time, Oxygen, Poly-Silicon, Resistance, Silicon, Tunnelling

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Сopyright:

© 1994 Trans Tech Publications Ltd. All Rights Reserved

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