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Characterization by X-Ray Diffraction of PZT (Pb(ZrxTi1-x)O3) Thin Films on Pt/TiN/BPSG/Si Substrate

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Periodical:

Materials Science Forum (Volumes 166-169)

Pages:

379-386

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.166-169.379

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Online since:

July 1994

Authors:

E. Cattan, F. Varnière, G. Chevrier

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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