Characterization by X-Ray Diffraction of PZT (Pb(ZrxTi1-x)O3) Thin Films on Pt/TiN/BPSG/Si Substrate

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Periodical:

Materials Science Forum (Volumes 166-169)

Edited by:

R. Delhez and E.J. Mittemeijer

Pages:

379-386

DOI:

10.4028/www.scientific.net/MSF.166-169.379

Citation:

E. Cattan et al., "Characterization by X-Ray Diffraction of PZT (Pb(ZrxTi1-x)O3) Thin Films on Pt/TiN/BPSG/Si Substrate", Materials Science Forum, Vols. 166-169, pp. 379-386, 1994

Online since:

July 1994

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