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HomeMaterials Science ForumMaterials Science Forum Vols. 175-178A Study of Defects in SiO2 Films on Si by...

A Study of Defects in SiO₂ Films on Si by Variable-Energy Positron Annihilation Spectroscopy

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Periodical:

Materials Science Forum (Volumes 175-178)

Pages:

157-160

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.175-178.157

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Online since:

November 1994

Authors:

Masanori Fujinami, N.B. Chilton

Keywords:

≡Si-O⁻ Defects, ≡Si-OH Impurity, Laser Irradiated SiO₂, SiO₂, Slow Positron Beam Positronium Formation, Tetraethylorthosilicate, Void

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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