Defect Profiling with Low Energy Positrons of Nitrogen Implanted Silicon

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Periodical:

Materials Science Forum (Volumes 255-257)

Edited by:

Y. C. Jean, Morten Eldrup, David M. Schrader, Roy N. West

Pages:

500-502

Citation:

D.P. van der Werf et al., "Defect Profiling with Low Energy Positrons of Nitrogen Implanted Silicon", Materials Science Forum, Vols. 255-257, pp. 500-502, 1997

Online since:

September 1997

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