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HomeMaterials Science ForumMaterials Science Forum Vols. 282-283Critical Parameters of Si Conversion into Si3N4...

Critical Parameters of Si Conversion into Si₃N₄ Nanophase Powder for Plasma Process

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Advanced Materials and Processes: YUCOMAT '97

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Periodical:

Materials Science Forum (Volumes 282-283)

Pages:

57-64

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.282-283.57

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Online since:

May 1998

Authors:

P.Lj. Stefanović, P.B. Pavlovic, Ž.G. Kostić, S. Šikmanović, D. Cvetinović

Keywords:

Critical Parameter, Nanophases, Plasma, Powder, Synthesis

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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