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HomeMaterials Science ForumMaterials Science Forum Vols. 294-296Microstructure of Epitaxial (InGa)As on a...

Microstructure of Epitaxial (InGa)As on a Borosilicate Glass-Bonded Compliant Substrate

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Intergranular and Interphase Boundaries in Materials III

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Periodical:

Materials Science Forum (Volumes 294-296)

Pages:

783-786

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.294-296.783

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Online since:

November 1998

Authors:

S.E. Babcock, K.A. Dunn, Ming Zhou, J.L. Reeves, T.F. Kuech, D.M. Hansen, P.D. Moran

Keywords:

(InGa)As, Chemical Vapor Deposition (CVD), Compliant Substrate, Scanning Electron Microscope (SEM), TEM, Wafer Bonded

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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