Aluminium Nitride Coatings Preparation Using a Chemical Vapour Deposition Process

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Periodical:

Materials Science Forum (Volumes 325-326)

Edited by:

S. Hampshire, M.J. Pomeroy

Pages:

125-130

DOI:

10.4028/www.scientific.net/MSF.325-326.125

Citation:

B. Armas et al., "Aluminium Nitride Coatings Preparation Using a Chemical Vapour Deposition Process", Materials Science Forum, Vols. 325-326, pp. 125-130, 2000

Online since:

January 2000

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$35.00

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